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| E Made-to-order products Device |
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| ■ RHEED Built-in Surface Analysis System |
| ●Outline |
■ Structural analysis of surfaces can be carried out with this RHEED system under an Ultra-High Vacuum environment. Information for the form and analyzed structure of the surface can be obtained.
The position of the specimen can be adjusted using the 4-axis manipulator located at the bottom of the machine, in which a carrier lock device is provided for the specimen. An Auges electron spectroscope can be mounted.
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