| ●Features |
| ■ High precision, high resolution |
| ■ The use of a stepping motor for the vacuum enables fully automatic operation and computer control. |
| ■ Easy positioning due to the stacked structure of the axes. |
| ■ Lightweight design using aluminum alloy, lower Outgassing. |
| ■ The detector and specimen can be rotated individually on the same axis. |
| ■ Equipped with heating （MAX. 700℃）and cooling（optional specification） mechanisms. |
