| ●Features |
| ■ We analyze the vacuum characteristics of your parts and units. |
| ■ Orders of all analysis scales are accepted, from only one piece to many produced on a commercial scale. |
| ■ Specialized in the expertise of Ultra-High Vacuum equipment, we deliver tested, dependable data. |
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| ■ Helium leak tests |
| General leak tests are performed on Vacuum chambers by using a helium gas. |
| Measurement methods |
Spraying,hood,and sniffer |
| Measurement range |
Up to the order of 10-12Pa・m3/sec |
| Standard price |
12,000/sample |
|
| ■ Outgassing rate measurement |
| The Outgassing rate of a sample per unit area can be measured in a dedicated chamber. Please use the Outgassing
rate as supporting data in situations where the Ultimate Vacuum Pressure or Outgassing rate in a vacuum is a concern.
Chamber Outgassing rate measurement is also available on order. |
| Measurement methods |
Throughput |
| Background pressure |
Up to 10-8Pa |
| Acceptable sample sizes |
Up to 80×80×20（mm）（for a regular fee） |
| Standard price |
300,000/sample |
|
| ■ Partial pressure measurement |
| The components of the Outgassing from a sample can be measured in a dedicated chamber. Please use the partial pressure measurements as supporting data in situations where the emission of specific gas components in a vacuum is a concern.
Chamber partial pressure measurement is also available on order. |
| Measurement apparatus |
Quadrupole mass spectrometer |
| Mass number range |
1 to 200 AMU |
| Standard price |
350,000/sample |
|
| In addition, Outgassing rate measurement by the buildup process and surface analyses by RHEED, AES, SEM, TEM
and more can be carried out. Please inquire about other specifications. |
※The amounts quoted above are typical ones. Cleaning and processing of jigs and samples would be available for separate fees.
※When tested samples and reports are delivered to a site which you determine, packaging and shipping fees may be incurred separately. |
