| ●Features |
| ■ Low radiation rate and high conductivity. |
| ■ Outgassing from the heat source was reduced to 1/100. |
| ■ Super low Outgassing is achieved by special treatment TOMI polishing. |
| ■ Ultra-High Vacuum of 10-9Pa level is obtained with low temper-ature baking at about 100℃. |
| ■ In baking above 250℃, an Extreme-High Vacuum is easily obtained. |
| ■ This technology controls Outgassing by adding certain improvement on the existing |
