| ●Features |
| ■ Separated function measuring instrument for SOR reflection mirror drive mechanisms and water-cooled SOR shutters. |
| ■ The reflection mirror drive and the shutter mechanism assemblies can be separated if necessary. |
| ■ High accuracy and high resolution with motor driven mechanism. |
| ■ Suitable for Ultra-High Vacuum. |
| ■ Made of aluminum alloy, lightweight, and completely non-magnetic. |