| ●Features |
| ■ High precision, high resolution |
| ■ The use of a stepping motor for the vacuum enables fully automatic operation and computer control. |
| ■ Easy positioning due to the stacked structure of the axes. |
| ■ Equipped with a heating mechanism for the specimen. |
| ■ Either JIS-VG 150 or ICF 152 can be selected for the mounting port. |